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Evolutionary search for new high-k dielectric materials: methodology and applications to hafnia-based oxides

机译:进化寻找新的高k介电材料:方法和   应用于基于氧化铪的氧化物

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摘要

High-k dielectric materials are important as gate oxides in microelectronicsand as potential dielectrics for capacitors. In order to enable computationaldiscovery of novel high-k dielectric materials, we propose a fitness model(energy storage density) that includes the dielectric constant, bandgap, andintrinsic breakdown field. This model, used as fitness function in conjunctionwith first-principles calculations and global optimization evolutionaryalgorithm USPEX, efficiently leads to practically important results. We found anumber of high-fitness structures of SiO2 and HfO2, some of which correspond toknown phases and some are new. The results allow us to propose characteristics(genes) common to high-fitness structures - these are the coordinationpolyhedra and their degree of distortion. Our variable-composition searches inthe HfO2-SiO2 system uncovered several high-fitness states. This hybridalgorithm opens up a new avenue of discovering novel high-k dielectrics withboth fixed and variable compositions, and will speed up the process ofmaterials discovery.
机译:高k电介质材料作为微电子学中的栅极氧化物以及电容器的潜在电介质很重要。为了使新型高k介电材料能够进行计算发现,我们提出了一个适应模型(储能密度),该模型包括介电常数,带隙和本征击穿场。该模型与第一性原理计算和全局优化进化算法USPEX一起用作适应度函数,可以有效地产生实际重要的结果。我们发现了许多SiO2和HfO2的高适应性结构,其中一些对应于已知相,有些是新的。结果使我们能够提出高适应性结构共有的特征(基因)-这些是配位多面体及其畸变程度。我们在HfO2-SiO2系统中进行的可变组成搜索发现了几种高适应性状态。这种混合算法为发现具有固定和可变成分的新型高k电介质开辟了一条新途径,并将加快材料发现的过程。

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